Silicon boats for horizontal furnace processes
CE-MAT also supplies silicon boats for all horizontal furnace processes. Boats with 25 of the 50 wafer slots for 150 – 300 mm wafers are available.
Customer requests regarding slot design and number can be implemented and adapted to the specific customer processes.
Another product for horizontal ovens are intermediate carriers. A carrier made of silicon for SiC boats.
The advantage is the delivery time (weeks instead of months)
CE-MAT provides a special version of the short finger boats – Sikle boats with removable wafer holders. The possibility of changing single sikle segments an ernormous cost saving potential is generated. In addition individual assembling oft he sikles ispossible.
