Spare parts
(Consumables for Etch, CVD, PVD)
Dummy Wafer (CVD SiC) and Wafer adapter (Singlecrystal Silicon)
Spare parts for
Ionenimplantation tools
Molybdenum, tungsten, graphite, ceramics components for equipment by Axcelis, Varian, AMAT
Distributor for PPE
(Precision Polymer Engineering)
O-Ring Seals, Centering Rings, Slit Valve Doors, Wafer Handler Components, Lip seals, Custom Seals
