Silicon parts for
furnace processes

High-temperature processes, heat treatment, oxidation

Ceramic ESCs
(spray coating)

ESCs for AMAT, TEL, Lam Research and SPTS-Tools

Spare parts
(Consumables for Etch, CVD, PVD)

Dummy Wafer (CVD SiC) and Wafer adapter (Singlecrystal Silicon)

Spare parts for
Ionenimplantation tools

Molybdenum, tungsten, graphite, ceramics components for equipment by Axcelis, Varian, AMAT

Distributor for PPE
(Precision Polymer Engineering)

O-Ring Seals, Centering Rings, Slit Valve Doors, Wafer Handler Components, Lip seals, Custom Seals

Inspection Tools

Visual examination, IR procedure,
PL examination