Quartz glass parts for semiconductor and solar industry
  • Parts for all common furnaces (vertical and horizontal)
  • Tanks and accessories for wet etch
Spare parts for Single Wafer Dry Etch & CVD
  • Quartz, silicon and ceramic parts for AMAT, TEL and LAM Etch and CVD tools
CVD SiC Dummy Wafer
Ceramic Spray Electro Static Chucks (ESC)
Silicon parts for furnace process
  • Boat, Liner & Injector out of silicon for CVD high temperature processes
  • Laserhead refurbishment for Zygo and HP
Spare parts for Ion Implanter